Cleanroom
ACQUANDAS uses of the Kieler Nanolab cleanroom facilities located at the Faculty of Engineering of the Christian-Albrechts-University. Inaugurated in August 2008, the Kieler Nanolab is a cleanroom of ISO category 5 (less than 3500 0.5 μm-particle/m3, 800 1 μm-particle/m3 and 30 5 μm-particle/m3) with a white area of 350 m3.
Numerous microsystem technology process are available, including:
- UV-lithography (laser lithography, spin-coating, dip-coating, 4″ and 6″ mask aligner, hotplates, drying ovens, wet benches)
- Deposition and etching tools (PVD, CVD, IBE, ICP-RIE)
- Wet chemistry
- Analysis (SEM, FIB, TEM, light microscopes, profilometer)
lithography area (with yellow light to protect photosensitive resists)
left: rapid thermal annealing system right: wet chemistry (ultrasonic baths, fume hood)
Materials lab
We characterize and test our materials thoroughly. In order to meet specific material properties of our customers (e.g. mechanical properties such as plateau stresses, or transformation temperatures) we apply a series of characterization methods:
- tensile tests at various temperatures
- fatigue tests
- metallographic analysis
- differential scanning calorimetry
- x-ray diffraction